PDComm.Gem300Axis

Enum

The GEM300 object area that a capability belongs to.

public enum Gem300Axis : uint

Members

Carrier

Enumerator

Carriers (SEMI E87).

Carrier = 2

ControlJob

Enumerator

Control jobs (SEMI E94).

ControlJob = 4

ProcessJob

Enumerator

Process jobs (SEMI E40).

ProcessJob = 1

Substrate

Enumerator

Substrates (SEMI E90).

Substrate = 3