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GEM300

GEM300 is the collective name for the SEMI standards that sit on top of GEM to automate 300 mm wafer fabs. In a 300 mm fab, carriers full of wafers arrive at the equipment by automated transport, and the host tells the equipment, job by job, which wafers to process with which recipe. GEM300 makes equipment and hosts handle that flow the same way.

Key standards

Section titled “Key standards”
Standard Name What it covers
SEMI E39 Object Services A common way to query and manage objects and their attributes on the equipment.
SEMI E40 Processing Management Process jobs: which substrates to process with which recipe.
SEMI E87 Carrier Management Services Carrier and load port states and carrier verification.
SEMI E90 Substrate Tracking Where each substrate, such as a wafer, is and what has happened to it.
SEMI E94 Control Job Management Control jobs that group process jobs and order their execution.
SEMI E116 Equipment Performance Tracking Equipment states and performance metrics.
SEMI E148 Time Synchronization Synchronizing the equipment clock, and the clock object.
SEMI E157 Module Process Tracking Tracking process steps inside equipment modules.

Each standard defines its own state machines and messages, mostly in streams S3, S14 and S16. See the SEMI documents for the details.

GEM300 capability catalog

Section titled “GEM300 capability catalog”

PDComm provides a declarative capability catalog for GEM300. Your application records, profile by profile, the GEM300 capabilities of an equipment configuration and their status, and reads that record back with a revision number. The catalog is data that lives apart from any HSMS or GEM session; it never sends a message to the peer.

A catalog looks like this:

catalog (revision N)
 +-- profile "LINE-A"
 |    +-- capability "pj-model"   axis=ProcessJob  status=ModelOnly
 |    +-- capability "carrier"    axis=Carrier     status=Planned
 +-- profile "LINE-B"
      +-- capability "cj-trial"   axis=ControlJob  status=Experimental

Axes

Section titled “Axes”
Value C constant .NET Gem300Axis Related standard
1 PDCOMM_GEM300_PROCESS_JOB ProcessJob E40
2 PDCOMM_GEM300_CARRIER Carrier E87
3 PDCOMM_GEM300_SUBSTRATE Substrate E90
4 PDCOMM_GEM300_CONTROL_JOB ControlJob E94

Status and verification label

Section titled “Status and verification label”

The status is a label your application assigns to a capability of its own equipment configuration. The catalog stores it as given, without interpreting it.

Value C constant .NET Gem300Status Meaning
1 PDCOMM_GEM300_PLANNED Planned A capability your application plans.
2 PDCOMM_GEM300_MODEL_ONLY ModelOnly A capability for which your application has the data model.
3 PDCOMM_GEM300_EXPERIMENTAL Experimental A capability your application runs on trial.

The verification label field takes the defined value PDCOMM_GEM300_UNVERIFIED (1; Gem300Verification.Unverified in .NET). The C++ wrapper and .NET fill it in by default.

Working with the catalog

Section titled “Working with the catalog”
  • When you create a catalog, you set limits for the number of profiles, capabilities per profile, total capabilities and identifier lengths. Every limit must be nonzero, and a profile can hold at most four capabilities.
  • pdcomm_gem300_capability_catalog_replace swaps in the complete list of profiles in one atomic step and returns the new revision and whether anything actually changed. Replacing with an empty list clears the catalog. Creating or replacing a catalog needs a license for the gem300 module; without one you get PDCOMM_LICENSE_REQUIRED and the catalog is unchanged.
  • A snapshot owns a copy of the contents at that moment. Replacing or clearing the catalog later doesn’t affect snapshots you already hold.
  • In C++, use Gem300CapabilityCatalog; in .NET, use Replace, Clear, GetInfo and Snapshot on Gem300CapabilityCatalog.

You can try the catalog in the GEM300 workspace of the GUI simulator and in the gem300-capability-profile-lifecycle scenario of the headless simulator. The SECS/GEM guides show how.

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